Syton® HT-50 Colloidal Silica Slurry
Syton® HT-50 is an aqueous colloidal silica with an average particle size of 40 nm. This product is sodium stabilized and has a unique particle size distribution. In addition, it has one of the lowest metal contents of any commercially available colloidal silica (Fig. 1). These properties make Syton HT-50 an excellent choice as a base material for polishing prime silicon wafers.
Mazin™ SR300 Colloidal Silica Slurry
The most recent development in our Mazin line of engineered slurries is the SR300 blend. A stock removal slurry specifically formulated to reduce copper and other trace metals that threaten IC performance, SR300 may be used at higher dilution ratios than competing brands while maintaining the high removal rates characteristic of the Mazin product line. Special additives limit pad glazing and provide stable performance for applications where recycling is used to lower costs.
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