In various I/C or MEMS device fabrications, use of specialty metals such as Platinum, Iridium, Ruthenium, Nickel Ferrite, Aluminum and Hafnium Oxide are becoming common practice due to their unique properties. Planarization of any of these noble metallic layer can only be achieved with slurries specifically formulated for the specific metal layers while still accounting for other metal layer(s) adjacent to the noble metal layer in order to prevent galvanic corrosion during the CMP process.
DuPont Air Products NanoMaterials has knowledge and expertise in polishing Specialty Metal films including numerous precious metal films. Please contact us to discuss how we can provide the solutions to meet your challenging needs to polish Specialty Metal Films.
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